Distribution Equipment

Fujifilm’s Genstream® high purity specialty chemical delivery system was specifically designed to be compatible with semiconductor chemicals, and to fit into today’s advanced fabs.

Our Genstream® was carefully designed to be easy to use and maintain, and to provide value to your process. Being fully modular, our Genstream® system solution can be uniquely tailored to address your specific process needs with minimum capital investment.

  • Full access from the front
  • Slide out scales
  • Separated electronics
  • Easy access from top opening cabinets
  • Chemical verification
  • Spill detection
  • Step by step software
  • Automated purge
  • Password protected operation mode
  • Open Architecture, no process or container patents
  • Will work with any supplier's containers
  • Supports 1.2L to 200L container sizes
  • Used for logic, DRAM, ASIC, DSPs, etc.
  • In use with all major OEM tools
  • BKM at numerous major end users
  • World Wide presence
  • Genstream® 3000 advanced comprehensive chemical delivery systems

Contact Us for more information and a complete product list

Chemical delivery systems designed with an open architecture compatible to many chemistries.

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